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Product detail description:
- Efficiency:
MPPS:>99.9995% (U15 )
DOP: > 99.9995%@0.1 - 0.2 micro meters
MPPS: >99.99995% ( U 16 )
DOP: > 99.99995%@0.1 - 0.2 micro meters
MPPS: > 99.999995 ( U 17 )
DOP:> 99.999995@0.1 - 0.1 micro meters
- Temperature: 80 oC
- Humidity: 100% RH
-Limit pressure: < 500 Pa
- Frame : Aluminum alloy
- Material: Carbon fiber
- Heat resistance, heat resolution, fire resistance.
- Tight washer: EVA
- Preserve material : PE
Usage:
- It is special designed for semiconductor industry, pharmaceutical, microelectronic, biological industry and operation room of hospital... |
